The preparation of hexagonal GaN:Mn and GaN:Fe epilayers has been studied b
y RF-plasma-assisted molecular beam epitaxy. GaN:Fe epilayers exhibit super
paramagnetic behavior, presumably due to ferromagnetic inclusions. GaN:Nln
epilayers can be expressed in the form of Ga1-xMnxN with x up to 0.02, indi
cating the successful preparation of the GaN-based magnetic alloy semicondu
ctor for the first time. The epilayers are primarily paramagnetic and highl
y resistive. For epilayers with very high Mn concentration (similar to 10(2
1) cm(-3)), analysis of the paramagnetic component has revealed the effecti
ve spin number S approximate to 2.5 together with the positive paramagnetic
Curie temperature. This suggests the presence of ferromagnetic spin exchan
ge between Mn ions.