We developed an atom-optical system that utilized a laser diode (LD) for bo
th laser atom cooling and trapping. The LD is easy to maintain and operate,
and is therefore suitable for engineering applications. The neutral atom b
eam of chromium was collimated by Doppler cooling and focused by a standing
wave lens, and then directly deposited onto a silicon substrate. A nanogra
ting structure with periodicity identical to the wavelength of the standing
wave, 212.78 nm, was successfully achieved. The atom beam generation, coll
imating, focusing and deposition processes were experimentally and theoreti
cally investigated.