Technological principles for creating kinoform elements on IR-transparent optical materials

This paper discusses the possibility of fabricating kinoform elements on IR -transparent optical materials. The ion-etching, rates of a number of IR gl asses. optical ceramics. and crystalline germanium arc determined, as well as the surface quality of polished substrates after ion etching and ion-che mical etching. Technological processes arc developed, and kinoform structur es are fabricated on IKS-25 glass and KGO germanium. (C) 2001 The Optical S ociety of America.