W. Claeys et al., Laser probes for the thermal and thermomechanical characterisation of microelectronic devices, MICROELEC J, 32(10-11), 2001, pp. 891-898
This paper presents a review of some of the recent works that we have done
on thermal characterisation of running electronic devices by laser probing.
Both the single point probing and the surface imaging methodologies are co
nsidered. Besides temperature mapping, laser point probing allows fault det
ection in integrated circuits. Electronic speckle pattern interferometry an
d shearography metholologies are presented, and examples of images of runni
ng power devices and this relation to the underlying thermornechanical stre
ss are shown. (C) 2001 Elsevier Science Ltd. All rights reserved.