Future metrology needs for synchrotron radiation grazing-incidence optics

An International Workshop on Metrology for X-ray and Neutron Optics, the fi rst of its kind, was held on March 16-17, 2000, at the Advanced Photon Sour ce at Argonne National Laboratory. Metrology specialists, beamline engineer s and scientists, and vendors from around the world met to evaluate current metrology instrumentation and methods used to characterize the surface fig ure and finish off long grazing-incidence optics used in synchrotron radiat ion beamlines, and to consider future needs for synchrotron, free-electron laser, and neutron sources. This paper summarizes the discussions on mirror and metrology requirements for the current and next-generation X-ray sourc es. Some recommended strategies for the needs of the future are also given. (C) 2001 Published by Elsevier Science B.V.