Design and fabrication of aspherical bimorph PZT optics

Bimorph piezoelectric optics with a third-order-polynomial surface is desig ned and a prototype is fabricated as active optics. Two pairs of silicon (S i) and lead zirconate titanate (PZT) piezoelectric ceramic are bonded as Si -PZT-PZT-Si together with a multi-electrode or thin film resistor coating u sed as the control electrode between Si and PZT and metallic films as groun ding between the interface of PZT ceramics, A linear voltage is applied to the bimorph PZT optics by probing the control electrodes from a two-channel controllable power supplier. In doing so, the optics surface can achieve a desired third-order-polynomial surface. Reducing hysteresis and creep in b imorph PZT X-ray optics is the only feasible way by inserting an appropriat e capacitor in series with bimorph PZT optics to significantly reduce both effects. (C) 2001 Elsevier Science B.V. All rights reserved.