Development of a surface profiler for optical elements

Authors
Kinoshita, T Fukui, K Asaka, S Yoshida, H Watanabe, M Horigome, T Ma, PJ Ohtsuka, K Iwanaga, M Ohshima, E
Citation
T. Kinoshita et al., Development of a surface profiler for optical elements, NUCL INST A, 467, 2001, pp. 329-332
Citations number
8
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002 → ACNP
Volume
467
Year of publication
2001
Part
1
Pages
329 - 332
Database
ISI
SICI code
0168-9002(20010721)467:<329:DOASPF>2.0.ZU;2-Y
Abstract
A surface profiler for optical elements used in synchrotron radiation beaml ines has been developed. By measuring the precise positions of an incident and reflected laser beam, the surface profile of mirrors and gratings can b e obtained. The profile of large mirrors up to 700 mm long and that of any other shape device such as plane and non-spherical mirrors can be also meas ured. The design concept and preliminary examples of profile measurements a re reported. (C) 2001 Published by Elsevier Science B.V.