Sputtered V/Al2O3 multilayer X-ray mirrors for the water window

Authors
Nefedov, A Zabel, H Schafers, F
Citation
A. Nefedov et al., Sputtered V/Al2O3 multilayer X-ray mirrors for the water window, NUCL INST A, 467, 2001, pp. 345-348
Citations number
17
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002 → ACNP
Volume
467
Year of publication
2001
Part
1
Pages
345 - 348
Database
ISI
SICI code
0168-9002(20010721)467:<345:SVMXMF>2.0.ZU;2-9
Abstract
It is reported on a novel type of multilayer mirrors for the soft X-ray reg ime, namely V/Al2O3 layered stacks grown on sapphire (11 (2) over bar0) sub strates by RF sputtering techniques, Experimental reflectivities obtained w ith soft X-ray synchrotron radiation from the BESSY I are presented. For a [V(1.25 nm)/Al2O3(1.27 nm)](50) multilayer a normal incidence reflectance o f 0.14% is obtained at 247.5 eV and a reflectance of 18% (theta = 27.9 degr ees) is yielded at an energy close to the L-3 edge of V. (C) 2001 Elsevier Science B.V. All rights reserved.