An 18 m spherical grating monochromator with high resolution and high photo
n flux has been constructed at the bending magnet beamline BL2B2 of the UVS
OR facility in the Institute for Molecular Science. The monochromator cover
s the energy range of 20-200 eV with three gratings. The resolving power (E
/DeltaE) has been estimated by ion yield spectra of rare gas atoms (He, Ar
and Kr) to be 2000-8000 under the conditions of a photon flux of 1 x 10(10)
photons s(-1) and a ring current of 100 mA. A second-order light of 7% is
contained at a photon energy of 45.6 eV. (C) 2001 Elsevier Science B.V. All
rights reserved.