An in-depth study of the single pulse and multiple pulse laser (35 ps, 10 H
z and 1064 mn) damage for threshold fluence and greater fluence of GaAs (10
0) single crystal is presented. Damage which starts at a power 2 x 10(11) W
/cm(2) in the form of pits occurs due to accumulation of laser induced micr
oscopic defects. Effect of multiple pulse at first makes the pits more prom
inent in the form of Ga emission. Then the topmost layer is removed. If the
number of pulses is further increased new pits are formed in the new surfa
ce (beneath the removed surface) and the above process is repeated. The the
rmal model is sufficient to explain this morphology. However, for larger fl
uences, a large cracking and fracture and the possibility of both Ga and As
emission in different ratios suggest that mechanical damage is a dominant
feature for hi-her fluences which arises due to generation of shock waves a
nd rapid vaporization of material. Damage threshold has been calculated wit
h the help of the thermal model given by Meyer et al. which is in good agre
ement with our experimental results. (C) 2001 Elsevier Science Ltd. All rig
hts reserved.