GaN based LEDs were analyzed by the Ion Beam Induced Charge Collection tech
nique. We describe the experimental setup and present the obtained results.
The experimental maps provide details on the structural inhomogeneity of t
he p-n junction and on the quality of the LED structure. Moreover, the tech
nique made it possible to highlight the induced beam damages. Nevertheless
the current-voltage curves and electroluminescence spectra were not affecte
d by the ionic bombardments.