We propose that hydrogen-passivated multivacancies which appear to be fully
saturated with H can actually capture additional H in electrically inactiv
e sites. In silicon, first-principles total energy calculations show that s
plitting an (m greater than or equal to 2) multivacancy into a mono- and an
(m - 1) vacancy provides a low-strain pairing site for H, 0.4 eV per H low
er than any known bulk pairing site. This monovacancy ejection mechanism is
an excellent candidate for the H reservoir found both in crystalline and a
morphous Si. A distinct H pairing on the fully saturated in vacancies, by f
orming an internal surface Si-Si dimer, provides the final state of light-i
nduced metastable degradation of hydrogenated amorphous silicon.