Safety solutions for high-pressure gas cylinders

Citation
R. Dubois et J. Mayer, Safety solutions for high-pressure gas cylinders, SOL ST TECH, 44(7), 2001, pp. 153
Citations number
10
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
44
Issue
7
Year of publication
2001
Database
ISI
SICI code
0038-111X(200107)44:7<153:SSFHGC>2.0.ZU;2-X
Abstract
Since the early 1960s, the use of high-pressure, specialty gases in semicon ductor manufacturing has significantly contributed to the rapid evolution o f integrated circuit technology. Compressed gas cylinders typically contain pressures up to 2500 psig. The potential energy controlled by these cylind ers is a function of fill pressure and gas reactivity. This combination has led to specialty gas cylinders often being referred to as "a sleeping gian t."