A measurement system for the determination of material properties of microcomponents on the basis of digital holography

Authors
Osten, W Seebacher, S Baumbach, T Juptner, W
Citation
W. Osten et al., A measurement system for the determination of material properties of microcomponents on the basis of digital holography, TEC MES, 68(2), 2001, pp. 80-85
Citations number
15
Categorie Soggetti
Instrumentation & Measurement
Journal title
TECHNISCHES MESSEN
ISSN journal
01718096 → ACNP
Volume
68
Issue
2
Year of publication
2001
Pages
80 - 85
Database
ISI
SICI code
0171-8096(200102)68:2<80:AMSFTD>2.0.ZU;2-F
Abstract
This contribution describes a new measurement system based on digital holog raphy which was developed to fulfill the special demands of the determinati on of material parameters of microsystem components. From a combined interf erometrical shape and deformation analysis several parameters of interest l ike Poisson-ratio, Young's modulus or the thermal expansion coefficients of micro-beams are derived.