Measurement of material properties on micro components

Material properties in microsystems can significantly differ from those of the respective bulk materials. Consequently, the measurement of material pr operties directly on microscopic components is an important issue. A new hy brid approach is presented which allows to measure material properties on c omponents consisting of different materials. The method includes finite ele ment simulation of the component deformation behavior and is demonstrated f or CTE measurement on thin sputtered layers. Furthermore, a new tool for CT E and Poisson ratio measurement on microscopic specimens is introduced.