Components for structured illumination and loading control of MEMS

Authors
Kopp, N Liedtke, B Meier, W
Citation
N. Kopp et al., Components for structured illumination and loading control of MEMS, TEC MES, 68(2), 2001, pp. 101-105
Citations number
7
Categorie Soggetti
Instrumentation & Measurement
Journal title
TECHNISCHES MESSEN
ISSN journal
01718096 → ACNP
Volume
68
Issue
2
Year of publication
2001
Pages
101 - 105
Database
ISI
SICI code
0171-8096(200102)68:2<101:CFSIAL>2.0.ZU;2-1
Abstract
The 3D-inspection system for the investigation of material properties of mi crocomponents contains a module for the measurement of the geometry of micr oparts. This module is based on the method of structured illumination and u ses a flexible and free-programmable LCD-matrix modulator. For the measurem ent of the material properties under thermal load several system components for precise temperature control and signal amplification were implemented.