Pj. Heaney et al., Focused ion beam milling: A method of site-specific sample extraction for microanalysis of Earth and planetary materials, AM MINERAL, 86(9), 2001, pp. 1094-1099
Argon ion milling is the conventional means by which mineral sections are t
hinned to electron transparency for transmission electron microscope (TEM)
analysis, but this technique exhibits significant shortcomings. In particul
ar. selective thinning and imaging of submicrometer inclusions during sampl
e milling are highly problematic. We have achieved successful results using
the focused ion beam (FIB) lift-out technique, which utilizes a 30 kV Gaion beam to extract electron transparent specimens with nanometer scale pre
cision. Using this procedure, we have prepared a number of Earth materials
representing a range of structures and compositions for TEM analysis. We be
lieve that FIB milling will create major new opportunities in the field of
Earth and planetary materials microanalysis, particularly with respect to u
ltraprecious mineral and rock samples.