ANALYSIS OF DEPOSITS EVAPORATED FROM SB-DOPED SI MELTS

To investigate the composition of oxygen-bearing species evaporated fr om Sb-doped Si melts, a carefully designed deposit collector was used. The collected deposits were analyzed by electron probe microanalysis (EPMA), gas fusion analysis (GFA), X-ray diffraction, and diffuse refl ectance infrared (DR-IR) spectroscopy. The results showed that the com positions of the deposits depended on the temperatures of various regi ons within the collector. Different deposits, with various amounts of antimony oxide, silicon oxide, silicon, and antimony, were found in di fferent temperature regions. In particular, it was discovered that ant imony oxide was deposited only in the region where the temperature was lower than 450 degrees C. Thus the present investigation gave evidenc e showing that oxygen depletion from Sb-doped Si melt probably arose f rom enhanced antimony oxide evaporation.