Crystal structure of Bi(OCMe2CH2OMe)(3) and its use in the MOCVD of Bi2O3

The crystal structure of the volatile bismuth alkoxide tris(1-methoxy-2-met hyl-2-propanolato)bismuth(III), Bi(OCMe2CH2OMe)(3), 1, has been determined by single crystal X-ray diffraction (XRD). The complex is mononuclear, cont aining a six-coordinate Bi-III, atom in a distorted octahedral environment. Using a solution of 1 in heptane, thin films of bismuth oxide have been de posited by liquid injection metal-organic (MO) CVD. Deposition was carried out over a wide range of substrate temperatures (250-550 degreesC) and, usi ng Auger electron spectroscopy (AES), films were shown to be pure bismuth o xide (Bi2O3) with no detectable carbon.