Gas phase vibrations as a tool for the characterization of CVD precursors and processes

Authors
Battiston, GA Gerbasi, R
Citation
Ga. Battiston et R. Gerbasi, Gas phase vibrations as a tool for the characterization of CVD precursors and processes, CHEM VAPOR, 7(5), 2001, pp. 225-229
Citations number
40
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
CHEMICAL VAPOR DEPOSITION
ISSN journal
09481907 → ACNP
Volume
7
Issue
5
Year of publication
2001
Pages
225 - 229
Database
ISI
SICI code
0948-1907(200109)7:5<225:GPVAAT>2.0.ZU;2-W
Abstract
In-situ, or in-line Fourier transform infrared (FTIR) spectroscopy can play an important role in the understanding of CVD processes, and some examples are reported. Moreover, gas phase composition analysis has been shown to b e a valid tool for the characterization of precursor volatility and evapora tion rate under a wide range of experimental conditions.