Microstructures of FeTaN films in the neck region of magnetic recording heads

We found that the columns at the neck region of a magnetic recording induct ive head slider composed of FeTaN and NiFe are tilted from the surface norm al when the pole materials are sputtered at a low substrate bias power. The electron diffraction patterns show that (110) texture has not strongly dev eloped in the FeTaN film. We have not observed noticeable voids throughout the film on the slider, which suggests the absence of microshape anisotropy . This observation is consistent with our previous study of FeTaN blanket f ilms. We confirmed lattice distortion in the FeTaN due to Th and N incorpor ation into a Fe matrix. No significant difference in microstructure between the film on the head slider and the blanket film is found. Based on all th e information we have gathered, such as X-ray spectra, pole figures, and hi gh-resolution electron micrographs, we established the crystallographic rel ationship between (110) orientation, columnar direction, and incident atomi c flux in the case of oblique-incident deposition of FeTaN films.