A micro-wear scan technique has been used to evaluate the tribological prop
erties and adhesion strength of ion beam deposited (IBD) CHx CHxNy, and spu
ttered CHx overcoats on magnetic recording disks. IBD carbon films with N c
ontent of 0-21% were deposited using different power conditions. High resol
ution SEM was utilized to determine the failure mechanisms and critical loa
ds. The critical load increased with the deposition power and the nitrogen
content in the films. The latter trend was somewhat surprising since the ov
ercoat density and hardness decreased with nitrogen concentration.