H. Kikuchi et al., Miniaturized high-frequency carrier-type thin-film magnetic field sensor with high sensitivity, IEEE MAGNET, 37(4), 2001, pp. 2042-2044
This paper discusses miniaturization and the sensitivity of a high-frequenc
y carrier-type thin-film magnetic field sensor. We examined a lift-off proc
ess as fabrication process instead of ion-milling process to obtain an even
edge and higher sensitivity when the sensor is miniaturized. Then, we used
a thin conductive interlayer to control the domain structure and demonstra
ted high sensitivity. The sensor dimensions were miniaturized to 3 mum wide
, 1 mum thick and 1 mm long. In this instance, an impedance change of 3 Ome
ga against external dc field was obtained. Moreover, a gain of 150 k Omega
/T was achieved.