Perpendicular-anisotropic Nd-Fe-B films can be obtained as-deposited at hig
h temperature. High deposition temperatures enhance the growth of columnar
grain structure. Isotropic Nd-Fe-B films were obtained by, deposition at ro
om temperature followed by post annealing in high vacuum. Two kinds of micr
ostructure were observed in cross-sectional TEM micrographs. Magnetic domai
ns of nanocrystalline Nd-Fe-B films were investigated by MFM to explain the
magnetization reversal behavior.