TbFe thin films with giant magnetostriction were deposited by DC magnetron
sputtering onto Si(100) substrate at different sputtering parameters, inclu
ding substrate temperatures (Ts, 20-420 degreesC), sputtering power (35-100
W) and sputtering time (5-30 min). The samples were amorphous as character
ized by XRD. Effect of sputtering parameters on domain structure, as explor
ed by magnetic force microscopy (MFM), was focused. The films prepared unde
r different sputtering parameters showed different domain patterns, such as
maze or/and spotty (bubble) ones. The easy axis either in-plane or out-of-
plane is affected by film-deposition parameters, specifically the film thic
kness. The wall energy (L gamma) increases with film thickness, leading to
looser bubble domains while the magnetic anisotropy constant (K-u) decrease
s with increasing substrate temperature.