The results of the electrical conductivity and Raman scattering measurement
s of CeO2 thin films obtained by a polymeric precursor spin-coating techniq
ue are presented. The electrical conductivity has been studied as a functio
n of temperature and oxygen activity and correlated with the grain size. Wh
en compared with microcrystalline samples, nanocrystalline materials show e
nhanced electronic conductivity. The transition from extrinsic to intrinsic
type of conductivity has been observed as the grain size decreases to < 10
0 nm, which appears to be related to a decrease in the enthalpy of oxygen v
acancy formation in CeO2. Raman spectroscopy has been used to analyze the c
rystalline quality as a function of grain size. A direct comparison has bee
n made between the defect concentration calculated from coherence length an
d nonstoichiometry determined from electrical measurements.