Citation
J. Tajima et al., Medium energy nuclear microprobe with enhanced sensitivity for semiconductor process analysis, NUCL INST B, 181, 2001, pp. 44-48
Citations number
7
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X
→ ACNP
Volume
181
Year of publication
2001
Pages
44 - 48
Database
ISI
SICI code
0168-583X(200107)181:<44:MENMWE>2.0.ZU;2-V
Abstract
A time of flight (TOF) Rutherford backscattering (RBS) system with a nano-p
robe line has been designed and installed. A medium energy (100-400 keV) na
no-probe with beam pulsing and multiscaling detecting techniques was used t
o obtain enhanced detecting sensitivity for localized analysis. The multisc
aling TOF detecting system has about 5 ns time resolution, corresponding to
an energy resolution of 2-5 keV, and an advantage over the conventional RB
S measurement system in energy resolution. Total charge exposed by TOF-RBS
measurement is 4-5 orders of magnitude less than that by conventional RBS u
sing a solid state detector (SSD). (C) 2001 Elsevier Science B.V. All right
s reserved.