Development of a sub-micron ion beam system in the keV range

The sub-micron ion beam system has been developed using the duoplasmatron-t ype ion source and special lenses with the double functions of the beam foc using and acceleration. The beam width was about 0.43 mum for about 30 keV hydrogen ions, though the value was slightly larger than the one estimated from the beam transport calculation. The slow drifting of the beam spot pos ition within 0.4 mum was observed during the experimental time of about 10 min. The improvements by means of introducing the beam injection system ena bled us to achieve the beam width of 0.28 mum and a slight drift of the bea m spot within 0.3 mum. (C) 2001 Elsevier Science B.V. All rights reserved.