Chemical state analysis of Cu,Cu2O and CuO with WDX using an ion microbeam

The possibility of chemical state analysis with a wavelength-dispersive X-r ay spectrometer system for particle-induced X-ray emission (WDX-PIXE) using a light ion microbeam. is described. High-resolution Cu L alpha (1.2) and L beta (1.2) X-ray spectra from Cu, Cu2O and CuO targets are measured using this spectrometer system. The incident microbeam. is focused 2.0 MeV proto ns with a beam size of 100(H) x 30(V) mum(2). The Cu L X-ray spectra show t wo clear main peaks and their satellites. The main peaks are the L alpha (1 .2) and the L beta (1) diagram lines, respectively. Due to a high detection efficiency of our spectrometer equipped with a position-sensitive detector for soft X-rays, the intensity ratio L beta (1)/L alpha (1.2) is observabl e, which is the lowest for pure Cu metal, and the largest for CuO. Moreover , the L alpha (1.2) X-ray spectrum for CuO shows a large shoulder at the hi gh energy side of the main peak, which is considered to be due to the chemi cal bonding between Cu and O atoms. The results show that this system can b e used for chemical state analysis for various compound materials and for a nalyzing small areas of materials or small particles. (C) 2001 Elsevier Sci ence B.V. AU rights reserved.