Micro-RBS as a technique for the determination of the surface topography of Bi film prepared by pulsed laser deposition

Particulate deposition on Bi film prepared by pulsed laser deposition (PLD) was studied by Rutherford backscattering spectrometry (RBS) using a 2 MeV He-4(+) scanning microbeam with a lateral resolution of 2 pm. Droplets and particulate-free areas could be detected and separated in the analysis, whi ch offers the possibility of independent measurement of the chemical compos ition of the thin film and the micron-sized droplets. Tomographic images il lustrated thickness inhomogeneities and cross-sectional thickness profile o f particulates and gave more detailed information about the surface topogra phy than the RBS spectra themselves. An example is discussed where thicknes ses larger than the probing depth could be measured. This unique combinatio n of possibilities makes micro-RBS a powerful technique for the complete an alysis of particulate thin films. (C) 2001 Elsevier Science B.V. All rights reserved.