Thin films of Y, La or rare earth (RE) hydrides exhibit a metal insulator t
ransition between their di- and trihydride phase. After H loading lateral d
iffusion samples of these materials contain an overview of all hydride phas
es present in the thin film phase diagram. In this paper the thin film YHx
system will be investigated. The unexpected presence of a lateral oxygen pr
ofile in the YHx sample necessitates a careful interpretation of local hydr
ogen concentration differences. In this paper the potential of ion beam ana
lysis will be discussed with respect to the investigation of oxidation and
hydrogenation of YHx switchable mirrors. The results of the measurements wi
ll be discussed in terms of differences between bulk- and thin-film-phase d
iagrams of YHx. The experimental methods used are H-1 (He-4, H-1)He-4 elast
ic recoil detection at 5 MeV and O-16(He-4, He-4)O-16 resonant backscatteri
ng around 3.036 MeV. (C) 2001 Elsevier Science B.V. All rights reserved.