Novel one-step method of microlens mold array fabrication

We present a novel method for fabricating microlens mold arrays. The mold a rray is fabricated using focused-ion-beam milling (FIBM) on a substrate of bulk SI. The 2-D profiles and surface roughnesses of the fabricated molds a re measured using a laser interferometer. Finally, the mold array is used f or hot embossed molding. The surface roughnesses of the mold and the replic a are 2.5 and 8 nm, respectively. We define surface roughness as the arithm etic mean of the absolute departure of the roughness profile from the mean line. A profile of the replica is acceptable for practical use. The measure d size of the replica corresponds well with that of designed array. (C) 200 1 society of Photo-Optical Instrumentation Engineers.