We present a novel method for fabricating microlens mold arrays. The mold a
rray is fabricated using focused-ion-beam milling (FIBM) on a substrate of
bulk SI. The 2-D profiles and surface roughnesses of the fabricated molds a
re measured using a laser interferometer. Finally, the mold array is used f
or hot embossed molding. The surface roughnesses of the mold and the replic
a are 2.5 and 8 nm, respectively. We define surface roughness as the arithm
etic mean of the absolute departure of the roughness profile from the mean
line. A profile of the replica is acceptable for practical use. The measure
d size of the replica corresponds well with that of designed array. (C) 200
1 society of Photo-Optical Instrumentation Engineers.