One-grating projection for absolute three-dimensional profiling

Citation
K. Korner et al., One-grating projection for absolute three-dimensional profiling, OPT ENG, 40(8), 2001, pp. 1653-1660
Citations number
19
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICAL ENGINEERING
ISSN journal
00913286 → ACNP
Volume
40
Issue
8
Year of publication
2001
Pages
1653 - 1660
Database
ISI
SICI code
0091-3286(200108)40:8<1653:OPFATP>2.0.ZU;2-F
Abstract
A new method for absolute 3-D profiling, based on the fringe projection tec hnique using a vertical scan mode, is described. With a combined measuremen t of the modulation and the phase it is possible to acquire the topography without any ambiguity problems by using one grating period only. Consequent ly, the vertical measurement range is limited only by the free working dist ance and the resolution is comparable to standard fringe projection techniq ues. We present a microscopic solution, based on a zoom stereo microscope, which enables interesting applications in an extended microscopic range, su ch as the measurement of microcomponents and microshapes, for example. (C) 2001 society of Photo-Optical Instrumentation Engineers.