An electron beam moire method is employed to measure the res-dual stra
in produced by a Vickers indenter in a WC-4. 7wt.% Co specimen. Line g
ratings 57 mu m wide by 45 mu m high, with a pitch of 87 nm, are writt
en by electron beam lithography. Two interior regions of the grating a
re loaded by the micro-Vickers indenter with 9.8 N for 30s. The residu
al stress interference phenomena caused by two impressions of the Vick
ers indenter are estimated by using the displacement fringes recorded
with the aid of an electron beam moire (EBM) technique. The measured r
esidual stresses are fitted to the theoretical values estimated by two
available models such as Yoffe model and CME (Chiang-Marshall-Evans)
model.