Waveguide-based single and multiple nozzle plasma torches: the TIAGO concept

Citation
M. Moisan et al., Waveguide-based single and multiple nozzle plasma torches: the TIAGO concept, PLASMA SOUR, 10(3), 2001, pp. 387-394
Citations number
17
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252 → ACNP
Volume
10
Issue
3
Year of publication
2001
Pages
387 - 394
Database
ISI
SICI code
0963-0252(200108)10:3<387:WSAMNP>2.0.ZU;2-F
Abstract
Various microwave-sustained, atmospheric-pressure plasma torches have been developed, investigated and applied over the last few decades. To avoid som e of their shortcomings, we have designed a novel torch termed TIAGO (Torch e a Injection Axiale sur Guide d'Ondes, in French). Its main advantages are simplicity, smooth impedance matching (low sensitivity to changes in opera ting conditions) and a short gas channel to prevent vapour condensation. Fu rthermore, it is possible to arrange TIAGOs in arrays to form a compact tor ch system which can be supplied, with equal distribution of power between p lasma flames, from a single waveguide. This unique feature makes the new de vice particularly suitable when high gas throughputs or sequential processi ng are required. We describe the design, electrodynamic characteristics and experimental investigation of various torch arrangements based on the TIAG O principle, operated at 2.45 GHz with powers of a few hundred watts up to 2-3 kW per nozzle.