Ion extraction from a helicon source and PIC simulation

Citation
M. Irzyk et al., Ion extraction from a helicon source and PIC simulation, PLASMA SOUR, 10(3), 2001, pp. 463-470
Citations number
13
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252 → ACNP
Volume
10
Issue
3
Year of publication
2001
Pages
463 - 470
Database
ISI
SICI code
0963-0252(200108)10:3<463:IEFAHS>2.0.ZU;2-Y
Abstract
The design of an ion extraction system often requires the help of computer codes. This article describes an experimental setup based on a helicon sour ce equipped with a three-grid extraction system and that is used as an ion source. A numerical approach based on a particles in cells (PIC) method is introduced. The results obtained with the ion source for different gases ar e compared with the simulation and are used in order to validate the comput er code. The numerical code is the first component of an ion source design package that deals with grid erosion and ion beam current distribution on t he target.