NUCLEATION ENHANCEMENT OF DIAMOND FILMS BY ION BOMBARDING AND ELECTRON EMITTING EFFECTS

Authors
WANG WL LIAO KJ ZHANG ZG LIAO MY POLO MC SANCHEZ G ESTEVE J
Citation
Wl. Wang et al., NUCLEATION ENHANCEMENT OF DIAMOND FILMS BY ION BOMBARDING AND ELECTRON EMITTING EFFECTS, Acta physica Sinica, 6(7), 1997, pp. 517-521
Citations number
11
Categorie Soggetti
Physics
Journal title
Acta physica Sinica → ACNP
ISSN journal
10003290
Volume
6
Issue
7
Year of publication
1997
Pages
517 - 521
Database
ISI
SICI code
1000-3290(1997)6:7<517:NEODFB>2.0.ZU;2-V
Abstract
Applying a proper negative bias-voltage onto the substrate, on which d iamond film is deposited by chemical vapor deposition technique, can g reatly improve the nucleation density. White nucleation enhancing, bot h the ion bombardment and electron emission may play an important role separately. However, for the highest nucleation density, both of the two effects must act together.