Systematic studies of electron interaction with perfluorinated targets carr
ied out recently in our laboratory revealed a distinct increase of the tota
l cross section, Q(tot), over the impact energy range from a dozen or so to
several tens of electronvolts, A likely reason for this striking feature i
s a significant contribution of elastic processes in this energy range. The
ratio of the total ionization electron-scattering cross section to the tot
al cross section can be expressed with a simple regression formula. That fo
rmula was used to estimate the GeH4 ionization cross section. (C) 2001 Else
vier Science Ltd. All rights reserved.