Hydrogen diffusion studies were performed in GaN samples with different Fer
mi level positions. It is shown that, at 350 degreesC, hydrogen diffusion i
s quite fast in heavily Mg doped p-type material with the Fermi level close
to E-v + 0.15 eV, considerably slower in high-resistivity p-GaN(Zn) with t
he Fermi level E-v + 0.9 eV, while for conducting and semi-insulating n-GaN
samples with the Fermi level in the upper half of the band gap no measurab
le hydrogen diffusion could be detected. For these latter samples it is sho
wn that higher diffusion temperature of 500 degreesC, and longer times (50
h) are necessary to incorporate hydrogen to appreciable depth. These findin
gs are in line with previously published theoretical predictions of the dep
endence of hydrogen interstitials formation in GaN on the Fermi level posit
ion. (C) 2001 American Institute of Physics.