X-ray fluorescence microtomography allows one to map element distributions
inside a sample with high sensitivity and resolutions in the micrometer ran
ge. Quantitative reconstruction of the element concentrations from the fluo
rescence data requires correction for the attenuation inside the sample. Ho
wever, the attenuation of the fluorescence radiation is not directly access
ible by experiment. The method described self-consistently estimates this a
ttenuation and allows one to reconstruct relative concentrations. This is d
emonstrated on numerical as well as experimental data. A measure for the qu
ality of the reconstruction is given. (C) 2001 American Institute of Physic
s.