Influence of thermal treatment on the crystallization and roughness of LinbO(3) thin films deposited by a spin coating method

Authors
Zirpoli, A Varela, JA Gonzalez, AHM Gimenez, R Cavalheiro, AA Cilense, M Zaghete, MA Stojanovic, B
Citation
A. Zirpoli et al., Influence of thermal treatment on the crystallization and roughness of LinbO(3) thin films deposited by a spin coating method, B S ESP CER, 40(4), 2001, pp. 275-278
Citations number
25
Categorie Soggetti
Material Science & Engineering
Journal title
BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO
ISSN journal
03663175 → ACNP
Volume
40
Issue
4
Year of publication
2001
Pages
275 - 278
Database
ISI
SICI code
0366-3175(200107/08)40:4<275:IOTTOT>2.0.ZU;2-L
Abstract
Lithium niobate (LiNbO3) thin films with 1/1 stoichiometry were prepared by a spin-coating from polymeric precursor method. The films deposited on sil icon (100) substrates, were thermally treated from 400 degrees to 600 degre esC for 3 hours in order to study the influence of thermal treatment on the crystallinity, microstructure, grain size and roughness. X-ray diffraction (XRD) results showed that LiNbO3 phase crystallizes at low temperature (40 0 degreesC). It was observed by scanning electron microscopy (SEM) that it is possible to obtain dense thin films at temperatures around 500 degreesC. The atomic force microscopy (AFM) results showed that the grain size and r oughness are strongly influenced by the annealing temperature.