SURFACE PROCESSING BY A COAXIAL PLASMA GUN

Authors
KELLY H LEPONE A MARQUEZ A LAMAS D OVIEDO C
Citation
H. Kelly et al., SURFACE PROCESSING BY A COAXIAL PLASMA GUN, Anales de la Asociacion Quimica Argentina, 84(5), 1996, pp. 517-521
Citations number
6
Categorie Soggetti
Chemistry
Journal title
Anales de la Asociacion Quimica Argentina → ACNP
ISSN journal
03650375
Volume
84
Issue
5
Year of publication
1996
Pages
517 - 521
Database
ISI
SICI code
0365-0375(1996)84:5<517:SPBACP>2.0.ZU;2-5
Abstract
A surface treatment of metallic samples irradiated by a Nitrogen ion b eam generated in a Coaxial Plasma Gun is presented. By placing a Titan ium insert in the inner electrode of the device, a TiN coating is simu ltaneously produced on she surface of the sample.