The low energy cluster beam deposition technique (LECBD) is developed to pr
epare original nanostructured systems from clusters preformed in the gas ph
ase. The nucleation and growth mechanism specific of the cluster deposits i
s studied Ln view to control the nanostructured morphology of the cluster a
ssembled films, especially for future applications to high areal density de
vices. Examples of the synthesis and properties of metallic nanostructures
as well as covalent ones are presented. In the first case, systems from nob
le metal clusters (Ag, Au, and AgxAu1-x) and transition metal based cluster
s (CO, SmCo5) assemblies are studied for their original optical or magnetic
properties, respectively. In the second case, covalent se mi conducting fi
lms exhibiting specific electronic structures are obtained by Si, C, and Si
xC1-x cage like clusters (fullerenes and heterofullerenes) depositions.