Citation
M. Zaborowski et al., A temperature microsensor for biological investigations, MICROEL ENG, 57-8, 2001, pp. 787-792
Citations number
2
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317
→ ACNP
Volume
57-8
Year of publication
2001
Pages
787 - 792
Database
ISI
SICI code
0167-9317(200109)57-8:<787:ATMFBI>2.0.ZU;2-0
Abstract
A microprobe for contact temperature measurements is described. It consists
of a silicon cantilever with a Ni thermoresistor deposited at the unfixed
end. Heat capacity of the probe and mechanical stress in Si is discussed to
gether with contact detection methods between the sensor and a plant tissue
sample. A resistance versus temperature curve is presented. (C) 2001 Elsev
ier Science B.V. All rights reserved.