Design of hybrid micro optical elements with coded gray-tone mask

A new method to fabricate hybrid micro-optical elements in one-step lithogr aphy is proposed in this paper. A gray-tone coding method has been develope d to achieve one step photolithography of achromatic hybrid micro-optical e lements. Design and simulation of hybrid lens with grey-tone mask are prese nted. The aberrations of optical elements are pre-corrected in the lithogra phy process. The operating range of the hybrid optical element is in infrar ed band (8.0 - 12.0 mum) with the central wavelength at 10.6 mum. (C) 2001 Elsevier Science BY. All rights reserved.