Evaluation and fabrication of AFM array for ESA-Midas /Rosetta space mission

Citation
W. Barth et al., Evaluation and fabrication of AFM array for ESA-Midas /Rosetta space mission, MICROEL ENG, 57-8, 2001, pp. 825-831
Citations number
9
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
57-8
Year of publication
2001
Pages
825 - 831
Database
ISI
SICI code
0167-9317(200109)57-8:<825:EAFOAA>2.0.ZU;2-3
Abstract
The MIDAS (Micro-Imaging Dust Analysis System) experiment is dedicated to t he micro-textural and statistical analysis of cometary dust particles. The instrument is based on the technique of atomic force microscopy. The compar ative simplicity and robustness of the technique lends itself to advanced s pace applications. The instrument is considered as essential for this missi on since, for the first time, it has the capability of three-dimensional im aging of interplanetary and pristine cometary particles in the manometer to micrometer range. In this paper we describe our effort to evaluate and fab ricate the AFM arrays for the ESA-Midas/Rosetta space mission. (C) 2001 Els evier Science B.V. All rights reserved.