X-ray imaging microscopy at 25 keV with Fresnel zone plate optics

Authors
Awaji, M Suzuki, Y Takeuchi, A Takano, H Kamijo, N Tamura, S Yasumoto, M
Citation
M. Awaji et al., X-ray imaging microscopy at 25 keV with Fresnel zone plate optics, NUCL INST A, 467, 2001, pp. 845-848
Citations number
4
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002 → ACNP
Volume
467
Year of publication
2001
Part
2
Pages
845 - 848
Database
ISI
SICI code
0168-9002(20010721)467:<845:XIMA2K>2.0.ZU;2-1
Abstract
X-ray imaging microscopy with a sputtered-sliced Fresnel zone plate (SS-FZP ) has been developed at an X-ray energy of 25keV. Objects were imaged in tr ansmission with the SS-FZP as an objective with a magnification of 10.2 tim es, and detected with a X-ray image sensor. The performance of the imaging microscope has been tested with a gold mesh and a resolution test pattern a t an undulator beamline 47XU of SPring-8. The resolution test patterns up t o 0.5 mum line-and-space structures have been resolved. (C) 2001 Elsevier S cience B.V. All rights reserved.