Y. Kagoshima et al., Scanning hard X-ray microscope with tantalum phase zone plate at the Hyogo-BL (BL24XU) of SPring-8, NUCL INST A, 467, 2001, pp. 872-876
A scanning hard X-ray microscope using a phase zone plate made of tantalum
as its X-ray focusing device is in operation at the Hyogo-BL (BL24XU) of SP
ring-8. The X-ray microbeam has a size of 0.8 mum x 0.7 mum at the photon e
nergy of 10 keV, which can make visible structures as fine as 250-nm line-a
nd-space pattern. The photon flux density at the sample position is similar
to 2 x 10(9) phs/s/mum(2) and the gain of the phase zone plate is similar
to 3000. The minimum detection limits irradiated by the microbeam are evalu
ated to be around 10 ppm for some trace elements contained in standard refe
rence materials of glass matrices. X-ray images obtained so far demonstrate
a high feasibility of the microscope. (C) 2001 Elsevier Science B.V. All r
ights reserved.