A hard X-ray microbeam created from a sputtered-sliced Fresnel zone plate h
as been tested at SPring-8 undulator beamline. Focusing properties are eval
uated in the X-ray wavelength regions of 0.15-1.5 Angstrom The measured foc
al beam size is about 0.6 mum at an X-ray wavelength of 1.4 Angstrom. In a
scanning microscopy experiment, resolution-test-patterns with 0.2 mum struc
ture are resolved at an X-ray wavelength of 0.45 Angstrom. (C) 2001 Elsevie
r Science B.V. All rights reserved.