The performance of a soft X-ray emission spectrometer employing a charge-co
upled device camera was examined in the energy range of 80-1250 eV. The spe
ctra observed by low-energy electron irradiation for metal L, oxygen K and
silicon L lines were in good agreement with the previous observations by co
nventional MCP detectors. The results suggest that the energy resolution is
good enough for the resonant excitation spectroscopy by synchrotron radiat
ion as well. (C) 2001 Elsevier Science B.V. All rights reserved.